Air tank
Oct 12, 2023| Air tank
The small diffusion pump high vacuum pump group is usually configured with a gas tank, which is arranged between the diffusion pump and the front pump to store the gas discharged by the diffusion pump. The reasons for setting the gas tank are:
1) The need for shock protection of the system
When the vacuum system is working, some processes require strict shock resistance, so the former mechanical vacuum pump needs to stop working for a period of time when the vacuum chamber is in working condition. During this time, the gas discharged by the diffusion pump is all stored in the gas tank, and the gas tank is used to replace the mechanical pump to maintain the normal operation of the diffusion pump.
2) In order to shorten the working cycle
Some production processes require that the vacuum chamber be put into the atmosphere in exchange for components and charging without closing the diffusion pump heater. The front pump of the vacuum unit is used as a pre-pumping pump. After loading, the vacuum chamber is pre-pumped with a mechanical pump, and the gas tank is used during this time to maintain the diffusion pump (as the front pump).
3) In order to prevent a large amount of instantaneous gas discharge in the vacuum chamber from affecting the normal operation of the diffusion pump
In the vacuum process production, the exhaust volume is particularly large in a certain period of time, but the time is short. If it is not economical to configure the mechanical pump according to the maximum exhaust volume at this time, the pre-stage storage tank can be configured in the system at this time to store a part of the gas at the maximum exhaust volume to avoid the pre-stage pressure of the diffusion pump exceeding the maximum reverse pressure.
4) Used to stabilize the diffusion pump outlet pressure
Since the exhaust of the mechanical vacuum pump is pulsed, although the frequency is not high (generally about 7 times/s), it will also cause fluctuations in the outlet pressure of the diffusion pump, and the setting of the gas tank can reduce such fluctuations.
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