Holding pump
Oct 11, 2023| Holding pump
Due to the long starting time of the diffusion pump and the oil booster pump, in the vacuum equipment with periodic operation, when the vacuum chamber is loaded and unloaded, the main pump is often not stopped in order to shorten the working cycle, and the high vacuum valve and the front pipeline valve are closed, so that the main pump is still in the working state. Because valves and so on always have a very small amount of air leakage and the surface of the valve and pump vent, after a certain time, the pressure in the main pump pump chamber increases, exceeding the maximum allowable pressure of the pump working liquid and oxidizing the pump oil vapor. In order to solve this problem, one way is to use the front pump to continue to extract the gas in the main pump, but at this time the amount of gas discharged in the main pump is very small, and the front pump is a big horse carriage, wasting energy. To this end, another method can be used to stop the work of the front pump, close the front pipeline valve, and set up a maintenance pump or gas storage tank at the outlet of the main pump, so as to ensure that the gas in the main pump can be discharged and energy consumption can be saved. The gas storage tank can not be made very large, it can only be used in a small vacuum unit with a diffusion pump as the main pump. Maintenance pumps can be used in vacuum units equipped with large main pumps.
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