External leakage and internal leakage of the vacuum chamber

External leakage and internal leakage of the vacuum chamber

The leakage we usually talk about generally refers to external leakage, that is, leakage from the outside of the vacuum chamber or pipeline to the inside; The internal leakage refers to the leakage between two vacuum chambers that should be isolated, between two sections of the vacuum pipeline isolated by the valve, or between the vacuum chamber and the pipeline. Below is a typical diffusion pump. pump group roots pump in high vacuum at the top of the valve should be closed, if the valve is closed lax, from the valve under high vacuum, gas will flow to the right side of the leak, the leakage is the internal leakage. Similar to external leakage, internal leakage can also cause problems such as prolonged high vacuum pumping time and limited vacuum variation. Leakage can be found directly by leak detector, while internal leakage can only make a preliminary judgment by piecewise pressure and so on, and then pull down suspicious of pipe on one side of the valve, and then to leak detection (or in the side of the suspicious valve connection leak detector, to the other side of the pipe into helium leak detection).

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