Structure of diffusion pump

May 13, 2022|

Structure of diffusion pump

The oil diffusion pump is mainly composed of a pump body, diffusion nozzle, vapor conduit, oil pan, heater, diffuser, cooling system, and jet nozzle. The pan can be heated when the oil diffusion pump is pre-pumped to a vacuum below 1 pa with the front stage pump. When boiling, the nozzle spews out a high-speed steam stream, and the thermal motion of the gas molecules diffuses into the steam stream and collides with the directional motion of the oil vapor molecules. The gas molecules thus gain momentum, producing directional flows in the same direction as the oil vapor molecules. At the front stage, the oil vapor is condensed, and released gas molecules, that is, are pumped away by the front stage pump to achieve the purpose of pumping.

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